Gas Sticks - Veriflo Division | Parker US
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Gas sticks are pressure control lines that ensure efficient gas delivery from a single source to multiple final use points in semiconductor manufacturing. These gas sticks are designed to regulate and indicate pressure, filter and isolate gases, thereby ensuring the smooth operation of the process. 

What Are Gas Sticks?

Gas stick solutions are primarily used in gas delivery applications, notably in semiconductor manufacturing. There are many processes gases used in the chip fabrication process that need to be routed from the sub fab to various locations in the fab. 

 

These process gases are routed through valve manifold boxes (VMBs), which consist of gas stick components that control gas flow through individual manifold lines. Gas sticks contain an inlet valve, a pressure regulator, a gauge, a downstream filter, and a check valve. A key feature of gas sticks are their leak-tight seals, which can be offered in welded or face seal connections.

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Gas Sticks in Semiconductor Manufacturing

Gas stick solutions play a pivotal role in gas delivery applications, providing the efficient and controlled delivery of gas from a single source to multiple final use points. This is crucial in semiconductor manufacturing, where different stages of the process may require different gases or gas mixtures. By providing a mechanism for controlling and indicating pressure, gas sticks ensure that each stage receives the appropriate gas at the correct pressure, thereby optimizing the manufacturing process.

 

Gas sticks are effective at limiting the risk of contamination with integrated filtration. In the semiconductor industry, even the smallest contaminants can lead to significant product defects or failures, making it essential to minimize contamination risks. Gas sticks, with their leak-tight seals, play an essential role in ensuring the safety of the operating environment. 

 

Gas sticks are used in highly delicate processes such as etching. During etching, certain gases are used to selectively remove material from the semiconductor wafer to create the desired structure. This process requires precise control over the gas flow and pressure, as well as strict isolation of gases to prevent contamination. Gas sticks, with their pressure control, isolation capabilities, and leak-tight seals, provide the necessary control and reliability for this critical stage of semiconductor manufacturing. They ensure that the etching process is carried out efficiently and accurately, contributing to the production of high-quality semiconductors.

 

Close-up of Silicon Die are being Extracted from Semiconductor Wafer and Attached to Substrate by Pick and Place Machine. Computer Chip Manufacturing at Fab. Semiconductor Packaging Process.

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