CASY — Custom Manifolds

Custom Assemblies and Custom Manifolds for Semiconductor Manufacturing

CASY’s, or custom assemblies, are valve manifolds integrated into a single body made from virgin, high purity, PTFE. These manifolds provide a variety of customer benefits including space savings, reduced connections, less leak points, reduced field installation time, reduced inventory part numbers and other advantages.

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Custom Assemblies, or CASY's, are valve manifolds consolidated into a single body made from virgin, high purity, PTFE. These manifolds are integral components in various industries, offering a plethora of benefits such as space savings, reduced connections, fewer leak points, decreased field installation time, and a reduction in inventory part numbers.

CASY's are designed to replace systems composed of discrete components, offering average space savings of over 70% depending on the design. This significant space reduction allows for the addition of more chemicals to a tool, enabling it to complete more processes. The integration of discrete valves into a single manifold reduces interconnections, which eliminates potential leak points. This not only enhances the system's reliability but also reduces the labor required for making these connections in the field.

Furthermore, CASY's offer the advantage of inventory simplification. A single CASY can integrate over 10 different components into a manifold, which means that only one part number needs to be stocked and planned for. This greatly simplifies inventory management, reducing the administrative burden and the risk of stocking errors.

CASY's address a multitude of challenges inherent to the semiconductor manufacturing process. One of the primary issues they tackle is space optimization. Semiconductor manufacturing often involves complex systems made up of discrete components, which can take up significant space. CASY's, designed as integrated valve manifolds, can replace these systems. For example, Veriflo's CASY's offers average space savings of over 70%. This allows for the addition of more chemicals to a tool, enabling it to complete more processes within the same footprint.

Another significant problem that CASY's solve is the risk of leaks. In systems composed of discrete components, each interconnection represents a potential leak point. Leaks can lead to potential safety risks. By integrating discrete valves into a single manifold, CASY's eliminate these interconnections, thereby reducing the risk of leaks. Moreover, with fewer connections to make, the labor required for field installation is also reduced, leading to further cost and time savings.

CASY's are used in various equipment throughout a semiconductor fab, such as copper deposition, wet etch, chemical mechanical planarization (CMP), slurry delivery systems, and other chemical tools. Since 2002, Parker Veriflo has been a reliable producer of CASY manifolds, with thousands of our custom assemblies operating in fabs worldwide.