Bellows Valves

Bellows Valves Solutions for Bulk Gas Applications

Ultra-high purity (UHP) bellows valves are designed with high flow capacity, making them ideal for installation throughout the entire semiconductor fabrication facilty, from the gas yard, through the central utility building, into the sub-fab area, and finally to point-of-use applications in the cleanroom.

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Bellows valves are integral components in systems that handle gases and other fluids. A bellows is essentially a flexible, accordion-like component that expands and contracts to allow movement while maintaining a hermetic seal. The bellows is typically made from a durable, corrosion-resistant material like stainless steel, and its design enables it to withstand high pressures and temperatures.

When operated, bellows valves expand or contract to enable the valve to open or close. The bellows design allows for high-flow capacity while maintaining an optimized form factor. Bellows valves effectively control the flow of gases or other fluids within the system. They can be opened or closed to start or stop the flow, or partially opened to regulate the flow rate. The hermetic seal created by the bellows valves ensures that the fluid path is isolated from the atmosphere, preventing contamination and ensuring the purity of the gases.

Bellows valves are instrumental in addressing several challenges in semiconductor manufacturing. One of their primary functions is controling fluid or gas flow within the system. Given the complex nature of semiconductor manufacturing, precise control over the flow of gases or fluids is crucial. Bellows valves, with their ability to start, stop, or regulate the flow rate, provide this necessary control, ensuring that each stage of the process receives the appropriate amount of fluid or gas.

Additionally, bellows valves greatly reduce the risk of contamination. In semiconductor manufacturing, even the slightest contamination can lead to significant product defects or failures. Bellows valves are designed with a flexible metal bellows that creates a hermetically sealed environment. This design ensures the isolation of the fluid path, significantly reducing contamination risk and ensuring the purity of the gases or fluids

A specific use case of bellows valves can be found in bulk gas delivery systems. The process requires control over a large volume of facility gases, such as hydrogen, oxygen, argon, nitrogen, and helium to be distributed across the facility.

Close-up of Silicon Die are being Extracted from Semiconductor Wafer and Attached to Substrate by Pick and Place Machine. Computer Chip Manufacturing at Fab. Semiconductor Packaging Process.

Parker Veriflo offers the following bellows valve options depending on your application requirements and needs.

500 Series

The 500 Series manual and pneumatic operated bellows valves are designed with the industry's leading straight-through full flow. This allows for maximum gas transfer through the main and lateral lines inside the fabrication facility. Fully functional from vacuum to 250 psig, these bellows valves are versatile for various operating conditions.

Applications:

Bulk Gas Delivery Systems
Facility Gas Main
Facility Gas Lateral

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700 Series

The 700 Series high-flow bulk facility valve is intended for use in ultra-high purity gas distribution systems. It features a unique lightweight design that reduces installation costs and can accommodate connection sizes up to 6-inches. With its excellent leak integriy and gas containment capabilities, the 700 Series is ideal for applications where process cleanliness is critical.

Applications: