Semiconductor Fab and Tool OEM Solutions

Veriflo's bulk diaphragm valves are designed to meet the needs of semiconductor applications that require precise and reliable flow control. These valves are available in a variety of sizes and with a range of options for actuation, materials, and surface finishes.

The diaphragm design ensures a leak-tight seal, while the bulk construction allows for high flow rates and minimal pressure drop. Whether you need to control gas delivery during semiconductor manufacturing or regulate chemical processes in a laboratory setting, Veriflo's bulk diaphragm valves offer the accuracy, durability, and flexibility you require.

Veriflo-constructed gas sticks (pressure control manifolds) are essential components of ensuring efficient gas delivery from a single source to multiple final use points in semiconductor manufacturing. They are used to control and indicate pressure, filter and isolate gases going to feed semiconductor process tools.

Veriflo manufactured “sticks” are thoroughly tested to industry standards. End users can expect leak-tight seals, which in turn ensures reduction of contamination risks and improving process yields. To ensure quick production throughput for completed manifolds, Veriflo utilizes its qualified UHP fittings, valves, and regulators as the core components of such gas stick modules. Whether for high-volume production or research and development, Veriflo’s gas sticks are a trusted solution for semiconductor gas delivery applications. 

In semiconductor bulk gas delivery systems, high-purity gas pressure regulators reduce high-pressure gas in a cylinder or process line to a lower, usable level as it passes to another piece of equipment. They also maintain pressure within a gas-delivery system.

High flow UHP gas pressure regulators are prominent on pressure control and filtration skids in semiconductor wafer fab. Such skids enable pressure regulation and particle capture between large facility purifiers and semiconductor fab bulk gas distribution.

Parker Veriflo’s UHP bulk gas pressure regulator models – the BFR5K and the HF / HFT 1200W are designed for applications that require both high flow capacity and operating pressure requirements. These regulators feature tied diaphgrams and no spring in the wetted surface area.

In semiconductor manufacturing, bulk gases are significant portion of the supply spend for semiconductor wafer fabs. Maintaining high purity conditions throughout the full gas distribution network is important. From the gas yard, through the central utility building, into the sub-fab area, and finally to point of use in the cleanroom, challenges exist to install flow control products – such as UHP bellows valves – that are designed with high flow capacity, with out restricted flow rates and significant pressure drops.

Parker Veriflo UHP 500 and 700 bellows valves are designed for bulk distribution of high purity inert & process gases, as well as solvent distribution systems where high flows, high containment, minimal “dead space”, and safe delivery are demanded. The UHP 500 and 700 Series bellows valves are designed for UHP inert & process gas distribution systems, Purifier skid systems, Filtration skid systems, and UHP solvent distribution systems.

Veriflo ultra high purity (UHP) pressure regulators are designed in collaboration with semiconductor tool equipment manufactures OEMs to solve unique application challenges.  Veriflo tool regulators have set the industry benchmark for performance and reliability over decades.  Veriflo serves OEMs around globe with continous supply chain optimatzation.

The largest and most successful semiconductor tool process manufacturers have built their gas delivery systems with Veriflo regulators due to superior performance and reliability. Veriflo's pressure regulators are designed to operate in harsh environments and can withstand the high temperatures and pressures required in semiconductor manufacturing. 

Veriflo gas tool products, such as the SQ2MICRO, are designed with low surface finishes, blended flow paths and minimal components in the flow path to minimize particle generation and entrapment points. 

Parker Veriflo has been making CASY’s (custom assemblies) for close to 20 years. These are valve manifolds integrated into a single body made from virgin, high purity, PTFE.  These manifolds provide a variety of customer benefits including space savings, reduced connections, less leak points, reduced field installation time, reduced inventory part numbers and other benefits.

CASY's are capable of replacing a system made of discrete components, with average space savings of over 70%. With that extra space, additional chemicals can be added to the tool to allow one tool to complete more processes. Combining discrete valves into a manifold eliminates interconnections, which eliminates all potential leak points. With half or more fitting connections eliminated, the labor required to make those connections in the field is also reduced. Veriflo CASY's can be integrated into a manifold with over 10 different components, which means that only one part number needs to be stocked and planned for.