BDV Series Bulk Diaphragm Valves Landing Page - Veriflo Division | Parker US
BDV Series Landing Page

Parker Veriflo's new ultra-high purity (UHP) bulk diaphragm valves are perfect for semiconductor manufacturing processes where precise control of gas and liquid distribution are of the utmost importance.

Precision Control and Absolute Purity

When it comes to semiconductor manufacturing, you need a supplier with a proven pedigree of clean, noncontaminating products that can be installed with confidence in the most critical applications.

Parker Veriflo’s new UHP bulk diaphragm valves enable precise control of gas and liquid distribution in semiconductor manufacturing processes. The BDV Series excel in high-flow, low-pressure conditions. They are ideal for bulk distribution systems, valve manifold boxes, tool hook-up applications, and wherever absolute purity and top-tier performance is required. 

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Advantages of Parker Veriflo's BDV Series

Why choose the BDV Series over other bulk diaphragm valve options?

  • Designed for high-flow, low-pressure conditions
  • Operating pressure from vacuum to 300 psig (0-21 barg)
  • Optimized diaphragm shape and bowl geometry improves purge ability and minimized particle entrapment
  • 316L stainless steel body assembly is fully traceable to material certifications
  • Tied diaphragm provides "positive retraction" while reducing particle generation and maximizing cycle life
  • Assembled, tested, and packaged in a Class 100 cleanroom
  • 10 micro inch Ra electropolished surface finish
  • Available in both standard and lateral configurations
  • Available with integrated Purge Ports

The cross section to the right shows the key advantages of the BDV Series bulk diaphragm valves.

BDV Cross Section
BDV Series Applications in Semiconductor Fab

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