Industries - Veriflo Division | Parker US
rendering of semiconductor fab and internal processes

Collaboration and Innovation

Semiconductor fabrication facilities face challenges in maintaining consistent gas and chemical delivery, minimizing downtime, and reducing the risk of contamination. Parker Veriflo products meet these challenges through precise flow control, reliable and durable components, and rigorous quality control measures to ensure maximum uptime and yield.

Through continued research and collaborative engineering with new product development teams, we develop innovative solutions that simplify complex processes and deliver results that keep industry moving forward.

aerial shot

Bulk Gas

Parker Veriflo semiconductor bulk gas distribution valves and regulators are utilized in the delivery of inert and process gases, from a wafer fab central utility building, through sub-fab ring and lateral gas distribution lines, and to final process points of use.  

Parker Veriflo UHP, 316L SS bellows and diaphragm valves and regulators are designed where high flow rates and minimal pressure drop are required. Parker Veriflo UHP valves and regulators are earmarked for delivery of UHP inert, toxic, and corrosive gases & solvents from source to point of use. Our unique valve and regulator designs, materials of construction, manufacturing & testing protocols make Parker Veriflo UHP valves and regulators the ideal choice where cleanliness, purity, and containment are demanded. 

Parker Veriflo UHP bellows and diaphragm valves and regulators are operated in a myriad of semiconductor gas delivery applications, including:

  • Bulk inert & specialty gas
  • Lateral inert & specialty gas distribution systems
  • Purifiers
  • Filter, Pressure Control, Purifier Skids
  • Valve Manifold Boxes (VMB) / Valve Manifold Panels (VMP)
  • Process Gas Cabinets
  • Process tool hook up floor modules
  • High Purity Solvent systems

Veriflo's Key Products:

view of gas distribution tools inside semiconductor fab

Gas Distribution

Veriflo products are used throughout the Gas Distribution Systems of a typical Semiconductor manufacturing facility.  Regulators, Valves and fittings are all used in various configurations that route gas from the source (either bulk storage or site generated) through the main lines, laterals and into process module manifolds where they are then further divided into process tools.  

Veriflo products are manufactured from Ultra High Purity and High Purity Stainless Steel alloys and manufactured utilizing a repeatable, high quality process in certified clean environments to reduce the likelihood of contamination and added impurities.  To ensure contamination and impurities are kept to a minimum, all products are packaged in accordance with industry standards for end user cleanroom  manufacturing. 

Parker Veriflo UHP and HP products are used in a variety of semiconductor gas delivery applications, including:

  • Process Control Manifolds / “Gas Sticks”
  • Valve Manifold Panels “VMPs”
  • Valve Manifold Boxes “VMBs”
  • Gas Cabinets
  • Gas Purification Systems
  • Gas Regulator panels

Veriflo's Key Products:

wide shot of inside semiconductor fab

Gas Tool

Parker Veriflo gas tool valves and regulators are uniquely designed solutions to meet the gas delivery needs of various semiconductor tool applications. Veriflo’s gas tool devices are designed closely with tool manufacturers to provide optimal performance, reliability, durability and safety.  All valves and regulators are constructed from UHP grade materials to provide exceptional corrosion resistance, leak integrity and maximum cycle life.

Veriflo gas tool products are designed with low surface finishes, blended flow paths and minimal components in the flow path to minimize particle generation and entrapment points. Cleanliness and performance are ensured as every unit is carefully assembled, 100% leak and performance tested and bagged in a class 10 cleanroom environment.

Veriflo’s gas tool products come in a wide range of pressures, flow capacities and end connections to cover all tool application needs, including:

  • Corrosive and specialty gases
  • Semiconductor tools - Deposition, Etch, Ion Implantation
  • Point-of-use
  • Gas control panels
  • Tool hook-ups
  • Gas cabinet
  • VMB
  • Low pressure and low flow

Veriflo's Key Products:

close up of semiconductor wafer undergoing chemical process

Chemical Delivery

Semiconductor device manufacturing uses a large variety of Ultra High Purity aggressive and toxic liquid chemicals used to process wafers on a submicron scale. 

Veriflo products are used throughout the Bulk Storage, Chemical Distribution as well as in process modules.  Products include Regulators, Valves, Fittings, Heat Exchangers and a wide range of Custom Assemblies. These products are made of inert, Ultra High Purity materials to ensure a minimum of contaminants and impurities are added into the liquid chemicals being used.  

Parker Veriflo PTFE and PFA products are used in a variety of semiconductor chemical delivery applications, including:

  • Chemical manifold boxes
  • Slurry delivery systems
  • Chemical delivery systems
  • Chemical mixers
  • DI Water
  • Cleaning tools
  • Wet etch
  • Copper deposition 

Veriflo's Key Products:

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