Parker Veriflo semiconductor bulk gas distribution valves and regulators are utilized in the delivery of inert and process gases, from a wafer fab central utility building, through sub-fab ring and lateral gas distribution lines, and to final process points of use.
Parker Veriflo UHP, 316L SS bellows and diaphragm valves and regulators are designed where high flow rates and minimal pressure drop are required. Parker Veriflo UHP valves and regulators are earmarked for delivery of UHP inert, toxic, and corrosive gases & solvents from source to point of use. Our unique valve and regulator designs, materials of construction, manufacturing & testing protocols make Parker Veriflo UHP valves and regulators the ideal choice where cleanliness, purity, and containment are demanded.
Parker Veriflo UHP bellows and diaphragm valves and regulators are operated in a myriad of semiconductor gas delivery applications, including:
Veriflo's Key Products:
Veriflo products are used throughout the Gas Distribution Systems of a typical Semiconductor manufacturing facility. Regulators, Valves and fittings are all used in various configurations that route gas from the source (either bulk storage or site generated) through the main lines, laterals and into process module manifolds where they are then further divided into process tools.
Veriflo products are manufactured from Ultra High Purity and High Purity Stainless Steel alloys and manufactured utilizing a repeatable, high quality process in certified clean environments to reduce the likelihood of contamination and added impurities. To ensure contamination and impurities are kept to a minimum, all products are packaged in accordance with industry standards for end user cleanroom manufacturing.
Parker Veriflo UHP and HP products are used in a variety of semiconductor gas delivery applications, including:
Veriflo's Key Products:
Parker Veriflo gas tool valves and regulators are uniquely designed solutions to meet the gas delivery needs of various semiconductor tool applications. Veriflo’s gas tool devices are designed closely with tool manufacturers to provide optimal performance, reliability, durability and safety. All valves and regulators are constructed from UHP grade materials to provide exceptional corrosion resistance, leak integrity and maximum cycle life.
Veriflo gas tool products are designed with low surface finishes, blended flow paths and minimal components in the flow path to minimize particle generation and entrapment points. Cleanliness and performance are ensured as every unit is carefully assembled, 100% leak and performance tested and bagged in a class 10 cleanroom environment.
Veriflo’s gas tool products come in a wide range of pressures, flow capacities and end connections to cover all tool application needs, including:
Veriflo's Key Products:
Semiconductor device manufacturing uses a large variety of Ultra High Purity aggressive and toxic liquid chemicals used to process wafers on a submicron scale.
Veriflo products are used throughout the Bulk Storage, Chemical Distribution as well as in process modules. Products include Regulators, Valves, Fittings, Heat Exchangers and a wide range of Custom Assemblies. These products are made of inert, Ultra High Purity materials to ensure a minimum of contaminants and impurities are added into the liquid chemicals being used.
Parker Veriflo PTFE and PFA products are used in a variety of semiconductor chemical delivery applications, including:
Veriflo's Key Products:
Semiconductor White Paper
Pressure regulators are essential components in many industries, as they play an important role in the delivery of gases and fluids. Device manufacturers tend to follow strict design standards and guidelines for safety, cleanliness, leak integrity and connection interface in order to cater specific products to different industries. Therefore, it is crucial to find reliable brands that can meet the demands of the semicon industry when searching for a pressure regulator.
Interactive Semiconductor Component Selector
In the absence of data, voice of the machine extracts data from the equipment via sensors to help inform us about what is happening in the environment. The equipment now has a voice and engineers can listen and talk to it in a way that's never been available before.
Our operating guides are intended to help you understand the use and maintenance of Veriflo products. These guides provide detailed information on product selection and operation safety, as well as how to use and maintain pressure regulators and diaphragm valves.
Our detailed datasheets contain comprehensive information about the specifications, features, and performance characteristics of each component or system. These datasheets are an essential resource to select the appropriate fluid control components for various applications.
Our blogs can provide valuable information on our products and services. Check out articles on various precision fluid control solutions and flow control technologies.