Division Menu:
Featured Elastomers & Custom Sealing Solutions
Sealing Solution Technology
 3840x1646.jpg)
Extreme Environment Sealing
FFKM Sealing Solutions for Critical Environments
To meet the crucial sealing demands of the life sciences industry, Parker offers a broad selection of specialty elastomers. Choosing the right material is vital to safeguard patient health, prompting the FDA to establish a standard (21 CFR 177.2600) that specifies the acceptable rubber compound ingredients and extractibles based on their toxicity and carcinogenicity. Typically, for patient-contact applications, a material that meets US Pharmacopeia (USP) Class VI and/or ISO 10993/3 is required.
OES 7013 Brochure
FF362 & FF364 Perfluoroelastomers
Resilient Sealing for Harsh Environments
Elevate wafer production to new heights with FF362-75 and FF364-65, our latest white perfluorinated elastomer materials designed for the semiconductor industry. Experience unmatched durability with their exceptional resistance to compression set, harsh chemicals, and even oxygen plasma, ensuring your processes stay clean and efficient. Withstand the heat of innovation with high-temperature performance up to 320°C, minimizing downtime and prolonging service life in the most demanding environments.
OES 7022: HF361-65 HiFluor Fluroelastomer for Semiconductor Applicatons
Parker HiFluor Compound HF361-65 is a tan-colored, highly fluorinated material that serves as a lower-cost alternative to FFKM in semiconductor processes like etching and deposition, offering comparable performance while facilitating easier installation in tight groove shapes and reducing the total
OES 7023: HF369-80 HiFluor Fluoroelastomer for Semiconductor Applications
Parker HiFluor Compound HF369-80 is an off-white, highly fluorinated material that serves as a cost-effective alternative to FFKM in semiconductor processes such as etching, ashing, and deposition, offering comparable performance while significantly reducing the total cost of ownership due to its ou
OES 7024: FF366-75 ULTRA FFKM for Semiconductor Applications
FF366-75 is an opaque perfluoroelastomer (FFKM) formulated by Parker for high-purity semiconductor processing up to 320°C, offering excellent etch resistance in oxygen and fluorine plasmas while minimizing metallic ion content, erosion, and particle generation, making it ideal for static applications in various deposition and etching processes.
OES 7016: FF380-75 ULTRA FFKM for Semiconductor Applications
FF380-75 is a high-purity white perfluorinated elastomer (FFKM) designed for aggressive semiconductor processing and cleaning environments, offering exceptional performance up to 320°C (608°F). Its enhanced compression set resistance and resilience help extend seal service life, reduce downtime, and minimize seal replacements in demanding wafer pro
Semiconductor Seal Materials Guide
In the semiconductor market, cleanliness and performance of seals is paramount in maximizing chip output and decreasing down time.
View our recommendations for utilizing Parker FFKM HiFluor and ULTRA elastomers for a range of semiconductor fabrication processes including, etch, plasma & gas deposition, thermal, wet.
Blogs