Evolve™ Semiconductor Sealing Solution

Shielded Seal Delivers Breakthrough Performance

Parker’s patented Evolve sealing technology equips semiconductor manufacturers with unparalleled plasma resistance and phenomenal seal cleanliness for static and quasi-dynamic sealing applications in place of standard o-rings.

Evolve™, a Parker-patented PTFE-FFKM seal, is ideal for high-tech applications, offering unmatched plasma resistance and superior cleanliness for semiconductor applications. The highly customized design places the PTFE shield exactly where plasma attack is its harshest, whether it be on its ID, OD, radial faces, or some combination thereof.

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Evolve composite seals for plasma attack resistance in semiconductor fabrication tools

The Evolve seal is a composite, two-part seal that incorporates a plasma-shielding PTFE element and perfluorinated (FFKM) elastomeric component.

When compared with common elastomeric vacuum o-ring seal technology, the upgraded hybrid seal delivers breakthrough performance within semiconductor fabrication equipment by extending seal uptime 2X-10X with dramatic reduction in leakage and seal contamination due to plasma attack

illustration of uncompressed semiconductor Evolve vacuum seal in dovetail groove

Got 15 minutes? View the on-demand webinar to learn how Parker's Evolve sealing technology, with its unique blend of materials, superior resistance to harsh conditions, and design innovations aimed at simplifying installation and extending service life, is helping today's fabricators achieve new benchmarks in semiconductor manufacturing.

webinar replay Evolve™ seal for semiconductor applications

Evolve™ Sealing Technology for Semiconductor Manufacturing

Learn more about Parker's Evolve™ semiconductor seal ring and how it's helping semiconductor customers overcome challenges with traditional sealing strategies.

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How can an upgraded sealing solution redefine standards in semiconductor manufacturing? Read the blog to discover.

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Parker’s patented Evolve sealing technology utilizes a PTFE shield that is energized by an ultra high purity elastomeric vacuum seal.

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Evolve™ Semiconductor Sealing Solution

Shielded Seal Delivers Breakthrough Performance

Evolve™ PTFE-FFKM Composite Seals

What components make up the Evolve plasma-resistant semiconductor seal ring?

Evolve™ Sealing Technology for Semiconductor Manufacturing

Evolve™ Sealing Technology for Semiconductor Manufacturing

Additional Support Tools

Read the Blog

Frequently Asked Questions

Explore more semiconductor sealing solutions

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Evolve™ Semiconductor Sealing Solution

Shielded Seal Delivers Breakthrough Performance

Evolve™ PTFE-FFKM Composite Seals

What components make up the Evolve plasma-resistant semiconductor seal ring?

Evolve™ Sealing Technology for Semiconductor Manufacturing

Evolve™ Sealing Technology for Semiconductor Manufacturing

Additional Support Tools

Read the Blog

Frequently Asked Questions

1. What is the Evolve Seal?

2. What advantages does the Evolve seal offer over traditional o-rings in static and quasi-dynamic sealing applications?

3. How straightforward is the installation process for the Evolve seal?

4. How does the Evolve seal defend against plasma attack?

5. How does Evolve maintain exceptional cleanliness?

6. What types of grooves is the Evolve seal designed to accommodate?

7. How does the Evolve seal streamline the assembly process?

8. How does the geometry of the inert PTFE shield in the Evolve seal contribute to its plasma resistance?

9. How does Evolve contribute to lowering the total cost of ownership?

10. What evidence can you provide about the effectiveness of Evolve in preventing seal failure due to plasma attack?

11. How do Evolve seals compare to standard FFKM O-rings in terms of cleanliness and particle counts?

12. What temperature ranges and chemical compatibilities can Parker's seals accommodate?

13. Why is sealing crucial in semiconductor fabrication technology?

14. What materials are typically used in semiconductor sealing?

15. What are the difficulties encountered in semiconductor sealing?

16. What are the recent advancements in semiconductor sealing technology?

17. What is the cost comparison between Evolve seals and traditional seals?

18. How does the Evolve seal perform under high-pressure conditions?

19. What is the availability of Evolve seals worldwide?

20. Can Evolve seals be custom designed for specific applications?

21. How does Evolve compare to traditional seals when it comes to compression set?

22. What is the method of attachment for the PTFE element and the perfluoroelastomer seal in the Evolve profile?

23. How would this compare against a PTFE coated O-ring? What’s the difference?

24. What cleanroom certifications does Parker have for the facility where this product is manufactured?

25. What’s the source of the FFKM component for this seal?

26. Is this seal patented?

27. What are the size limits and are there standards being offered?

28. Are the PTFE and the sealing element UV resistant?

29. Are Evolve seals only used in semicon tools for plasma implantation? Do we use them in CVD, PVD, Etching or EPI?

30. Does Evolve technology extend to NW, KF centering rings?

31. Is the PTFE element molded or machined?

32. Can you summarize what were the specific material properties of the Evolve o-ring which makes it achieve these improved results, such as 90% weight loss reduction (as described in the webinar) during processes and other results.

33. Is a special o-ring groove required to place Evolve.

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