Key Resources
Microelectronics Catalog
Learn more about our filtration products for Semiconductor and High-Purity applications.
Microelectronics Linecard
Take a quick glance at our microfiltration products engineered for microelectronic applications.
White Paper
Read our white paper, Trends in Semiconductors: A Robust Industry Growth for a review of chip demand and technology advancements.
SEMICONDUCTOR APPLICATIONS
Batch Wet Etch & Clean
Parker offers a range of filter cartridges in chemically resistant and low metals materials that can improve process bath turnover. Our exclusive SELECT pleat filters provide the flow and lifetime typically desired in critical wet etch and clean processes. In addition, our Fluorocap line of filter capsules are highly effective in removing particles from very aggressive and high temperature wet processes.
Fluoroflow-HSA Pleated Membrane
The Fluoroflow®-HAS pleated membrane filter cartridge provides good flow rates and on-stream life. The enhanced pleating provides more than 40% more surface area than our standard Fluoroflow filter cartridge. Available in 0.03, 0.05, 0.1, 0.2, 0.45 and 1.0 µm sizes.
Fluorocap Capsule Filter
The Fluoroflow® pleated membrane filter cartridge is our standard product for aggressive wet etch and clean industrial chemical filtration applications. The filter provides good flow rates and on-stream life at an economical cost. Available in 0.05, 0.1, 0.2, 0.45 and 1.0 µm sizes.
Fluoroflow-Select Pleated Membrane
The Fluoroflow-Select pleated membrane filter cartridge provides exceptional flow rates and on-stream life. It utilizes our unique SELECT pleat technology which increases filtration area and flow rate by over 70% versus our standard Fluoroflow filter. Available in 0.03, 0.05, 0.1, 0.2, 0.45 and 1.0 µm sizes.
Fluoroflow-XF Pleated Membrane
Parker’s Fluoroflow-XF all-fluoropolymer membrane filter cartridge provides unmatched flow rates and on-stream life with excellent chemical resistance for aggressive applications up to 150°C. Available in 0.05 and 0.1 µm sizes.
Chemical Distribution
Chemical distribution systems are designed to deliver chemicals and chemistries to the production tools used for wet processing of wafers. Parker Bioscience Filtration offers filters that are ideal for chemical distribution, designed for single or minimal pass systems and optimized for the highest particle removal efficiency and cleanliness.
Fluoroflow Cartridge Filter
The Fluoroflow® pleated membrane filter cartridge offers all-fluoropolymer construction and provides good flow rates and on-stream life at an economical cost. Available in 0.05, 0.1, 0.2, 0.45 and 1.0 µm sizes.
Fluoroflow-Select Cartridge Filter
All-fluoropolymer construction with innovative SELECT pleating technology to increase filtration area by over 70%. Available in 0.03, 0.05, 0.1, 0.2, 0.45 and 1.0 µm sizes.
Fluoroflow-HSA Cartridge Filter
All-fluoropolymer construction with more effective filtration area for increased flow. Available in 0.03, 0.05, 0.1, 0.2, 0.45 and 1.0 µm sizes.
Chemflow-PE Cartridge Filter
Chemically resistant PTFE/HDPE construction with low metal extractables. Available in 0.05, 0.1, 0.2 and 1.0 µm sizes.
ECD Copper Plating
Parker's Clariflow (hydrophilic PES membrane) and Proflow (hydrophilic PTFE) filters do not require wetting and are highly compatible with most copper plating solutions. These filters are available in different lengths to fit both higher flow recirculated plating processes as well as low flow single wafer plating applications.
Chemflow-PE Select Cartridge Filter
Chemically resistant HDPE/PTFE with innovative SELECT pleating technology to provide outstanding flow. Available in 0.03, 0.05, 0.1, 0.2 and 1.0 µm sizes.
Chemflow-XF Cartridge Filter
Chemically resistant HDPE/PTFE for recirculated applications under 60°C. Available in 0.03, 0.05 and 0.1 µm sizes.
Clariflow-E Select Pleated Membrane
Unique hydrophilic PES mirrored anisotropic membrane and high-purity, all polypropylene support structure with innovative SELECT pleating technology for increased flow. Available in 0.02, 0.04, 0.1 and 0.2 µm sizes.
Polyflow Pleated Depth Filter Cartridge
Thermally bonded virgin all-polypropylene absolute-rated depth filter for pre-RO. Available in 0.06, 1.2, 2.5, 5.0, 10.0, 20.0 and 40.0 µm sizes.
Single Wafer Etch & Clean
Parker's line of filter cartridges and capsules come in a range of sizes that are well suited for single wafer etch and clean processes. Our Ultraclean process is offered as an option for critical processes that require the very lowest in metal extractables.
Fluoroflow Cartridge Filter
The Fluoroflow® pleated membrane filter cartridge is our standard product for aggressive wet etch and clean industrial chemical filtration applications. The filter provides good flow rates and on-stream life at an economical cost. Available in 0.05, 0.1, 0.2, 0.45 and 1.0 µm sizes.
Fluoroflow-Select Pleated Membrane
The Fluoroflow-Select pleated membrane filter cartridge provides exceptional flow rates and on-stream life. It utilizes our unique SELECT pleat technology which increases filtration area and flow rate by over 70% versus our standard Fluoroflow filter. Available in 0.03, 0.05, 0.1, 0.2, 0.45 and 1.0 µm sizes.
Fluoroflow-HSA Pleated Membrane
The Fluoroflow®-HAS pleated membrane filter cartridge provides good flow rates and on-stream life. The enhanced pleating provides more than 40% more surface area than our standard Fluoroflow filter cartridge. Available in 0.03, 0.05, 0.1, 0.2, 0.45 and 1.0 µm sizes.
Fluorocap Capsule Filter
The Fluorocap® encapsulated filter cartridge is our standard product for aggressive wet etch and clean applications. The Fluorocap encapsulated filter cartridge provides good flow rates and on-stream life at an economical price. Available in 0.03, 0.05, 0.1, 0.2, 0.45 and 1.0 µm sizes.
Ultra-Pure Water
Parker's Polyflow all-polypropylene absolute rated depth filters provide pre-RO protection from large particles. Our line of Clariflow filters are rated down to 0.02 microns and are instrumental in ensuring the DI water, used for the most critical point-of-use applications, is free of yield limiting particles.
Fluoroflow Pleated Membrane
All-fluoropolymer construction for high temperature DI water applications and aggressive ozone sanitation. Available in 0.05, 0.1, 0.2, 0.45 and 1.0 µm sizes.
Clariflow-E Pleated Membrane
Unique hydrophilic PES mirrored anisotropic membrane and high-purity, all polypropylene support structure. Available in 0.02, 0.04, 0.1, 0.2, 0.45, 0.65 and 0.8 µm sizes.
Clariflow-E Select Pleated Membrane
Unique hydrophilic PES mirrored anisotropic membrane and high-purity, all polypropylene support structure with innovative SELECT pleating technology for increased flow. Available in 0.02, 0.04, 0.1 and 0.2 µm sizes.
Clariflow-WE Pleated Membrane
Hydrophilic PES membrane and high-purity, all polypropylene support structure. Available in 0.04, 0.1, 0.2, 0.45 and 0.65 µm sizes.
Product Service & Support
Bioscience N.A.
Parker Bioscience & Water Filtration
2340 Eastman Ave.
Oxnard, California
93030 United States
Ph: +1 (805) 604-3400
bwf.oxn.support@support.parker.com
Bioscience EMEA
Parker Hannifin Manufacturing Ltd
Durham Road, Birtley
County Durham
DH3 2SF United Kingdom
Ph: +44 (0)191 4105121
befe.birtley.support@support.parker.com