The semiconductor industry is evolving rapidly, driven by AI advancements, rising demand for high-performance chips, and increasing production challenges.
With expertise in instrumentation, filtration, fluid and gas handling, and engineered materials, Parker provides precision-engineered components for front-end and back-end machine tooling, ensuring optimal performance in wafer fabrication, lithography, and packaging. Parker solutions also support semiconductor manufacturing plant applications, including facility rooms, sub-fabrication rooms, clean rooms, and fan decks—helping manufacturers maintain ultra-clean environments and meet stringent industry standards.
From gas distribution and chemical delivery to vacuum and cooling systems, Parker’s high-purity solutions empower semiconductor manufacturers to overcome supply chain constraints, improve operational efficiency, and drive innovation in next-generation chip production.
Semiconductor Solutions
Easily explore Parker's semiconductor solutions with our interactive visual selector. Find the precise components and systems you need for advanced manufacturing, cleanroom environments and high purity applications to optimise efficiency, ensure reliability and strengthen supply chain resilience.
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RESOURCES AND INSIGHTS
White Paper
Discover the Future of Semiconductors
Discover what is driving the rapid growth trajectory of the semiconductor industry including AI, 5G, IoT, and data centers. This white paper explores key trends, challenges, and regional strategies shaping the market, plus how Parker’s advanced solutions help manufacturers stay ahead.
White Paper
Selecting the Perfect Regulator
Pressure regulators are essential components in the semiconductor industry and choosing the right regulator can have critical consequences. This white paper will help simplify your selection process by covering what factors to consider for your application.
SEMICONDUCTOR PRODUCT HIGHLIGHTS
Parker provides a variety of innovative products to help engineers solve inherent semiconductor industry challenges. These products ensure optimal performance, digital transformation, efficiency and, overall, help build a better tomorrow.
PROCESS INSTRUMENTATION
FEATURED PRODUCTS
UHP Regulators
Parker Veriflo’s FR 1000, FR 1200, FR 1300, and FR 1400 Series of ultra-high purity regulators provide precise, stable control of process gases in downstream point-of-use applications, reducing short- and long-term costs for semiconductor OEMs, integrators, and fab facilities.
UHP Bulk Diaphragm Valve
The BDV Series is a "positive retraction" diaphragm valve that enables precise control of gas and liquid distribution in semiconductor manufacturing processes.
PFA Valves
PFA & PTFE products provide a leak tight connection with minimal dead volume and are ideally suited for use in ultra-high purity (UHP) semiconductor manufacturing and/or corrosive chemical applications.
Point of Use Pressure Regulator
Designed for UHP point-of-use applications requiring precision pressure control in a small form factor. The product’s advanced performance and specifications makes it ideal for use in critical semiconductor tool operations.
PTFE Manual Stop Cock 2 Way or 3 Way Valve
The MV-1 Series PTFE Manual Stop Cock Valve offers high cycle life, excellent leak integrity and exceptional resistance to corrosion. It is available in a variety of sizes and flow capacities and is ideal for use in highly aggressive liquid applications (up to 60 psig).
PROCESS FILTRATION
FEATURED PRODUCTS
Fluorocap Filter Capsule
The Fluorocap® encapsulated filter cartridge is our standard product for aggressive wet etch and clean applications. The Fluorocap® encapsulated filter cartridge provides good flow rates and on-stream life at an economical price.
Chemflow®-PE Select Filter Cartridge
These filter cartridges use a PTFE membrane that provides an economical, high-performance alternative to all-fluoropolymer filter cartridges. With its SELECT pleating technology, liquid flow rates are increased by up to 50% compared to our standard Chemflow®-PE.
Hypercool Water Cooled Aftercooler
Highly efficient water cooled aftercoolers for the removal of water vapour and cooling of compressed air and gases downstream from compressors and blowers.
Compressed air filters
High efficiency compressed air filters for applications requiring large flow rates up to 31248 m³/hr @ 7 bar g with a maximum operating pressure of 16 bar g.
Zero loss WVM dryers
Low energy large flow industrial compressed air dryers providing flow rates up to 7300m³/h @ 7 barg with a dew point of -40°C (-20°C and -70°C options). Energy savings of up to 25%.
FLUID AND GAS HANDLING
FEATURED PRODUCTS
LF3800 Push-In Fittings for Clean Rooms
Parker Legris has developed this range of stainless steel fittings for conveying corrosive fluids in aggressive environments. The range provides two complementary levels of corrosion resistance and a hygienic external design.
Chemical Compatible 316 Quick Couplings
Parker's FS Series stainless steel non-spill quick couplers and nipples are ideal for use in applications where chemical or corrosive fluid lines require fast and easy connection and disconnection with minimal spillage and environmental contamination and limited air inclusion.
NCW Hose
PTFE hose with a nomex braid eliminates RFI issues and theyare also less susceptible to cracking from stress or flexing than metal hose assemblies.
Push-Lok Hose
Parker's 801 hose has a pressure range of 200-350 PSI, and is amongst the Push-Lok Plus multipurpose hose line which features the widest fluid compatibility, application range and size range in the industry.
PFA Tubing
When temperature and clarity are both factors, Parker's PFA tubing is the product of choice. PFA offers the high-temperature attributes of PTFE, long continuous lengths and almost as much clarity as FEP tubing.
ENGINEERED MATERIALS
FEATURED PRODUCTS
Fluorocarbon O-Ring V0747
The Parker Prädifa O-ring made from the V0747 FKM material is suitable for a wide range of semiconductor applications. It shows very low gas permeability, similar to butyl rubber, very good mechanical robustness and good resistance to gap extrusion.
Parofluor® O-Ring V8787
The Parker Prädifa perfluoro elastomer O-ring made from the V8787 FFKM material is suitable for a wide range of challenging applications, including semiconductor applications. It shows excellent solvent and media resistance and very good thermal resistance and mechanical robustness.
Parofluor® O-Ring V8921
The Parker Prädifa perfluoro elastomer O-ring made from the white V8921 FFKM material with excellent chemical and thermal compatibility is suitable for a wide range of clean and sterile applications, including semiconductor. It shows excellent media and thermal resistance as well as good mechanical robustness.
FlexiSeals®
FlexiSeals are highly effective sealing solutions used in semiconductor applications due to their advanced design and material properties. These seals are engineered to provide reliable performance in extreme environments, such as deposition and etch operations. Key features include outstanding chemical compatibility, thermal stability, and low friction. These materials ensure minimal outgassing and leachable contaminants, which are critical for maintaining process cleanliness in semiconductor manufacturing.
Metal Seals
Metal seals are critical in semiconductor applications due to their ability to maintain ultra-high purity (UHP) conditions, resist extreme temperatures, and ensure leak integrity in demanding environments. They are commonly used in gas distribution systems, tool hook-ups, valve manifold boxes, and other semiconductor manufacturing processes where cleanliness and reliability are paramount.
ELECTROMECHANICAL
FEATURED PRODUCTS
Linear Positioners
High-performance, high-quality and high-strength precision linear positioners, available in both standard and bespoke configurations with a range of different drive technologies available. Ideal for high speeds and high accelerations.
Variable Frequency Drives
Parker AC drives can improve the productivity, reliability, energy consumption and overall user control. The range includes solutions for simple motor speed control, through to complex, multi-axis system solutions. Parker AC drives offer precise speed control in powers from 0.25Kw to 450 Kw and adhere to the highest industry standards.
Parker Automation Controller
The Parker motion controller PAC is a programmable controller based on the IEC 61131-3 and PLCopen motion standards. It combines machine logic, real-time motion control and visualization into a standard fan-less and easily mountable din rail solution.
Linear Motor
Parker offers an extensive range of products and solutions with advanced functionality and standardized interfaces to meet customer servo application needs. Products include stand-alone and multi-axis solutions.
Linear Actuator
Parker offers an industry-leading range of linear actuators and cylinders for pneumatic, electric and hydraulic systems. These actuators and cylinders come in a wide range of construction types, ranging from compact light duty aluminum air actuators to motorized electric actuators and heavy duty hydraulic designs.
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About Parker Semiconductor Solutions
The semiconductor industry is constantly evolving, and rapid expansion in data, 5G, artificial intelligence and IoT is driving demand for smaller, more energy-efficient products.
Semiconductor solutions play a crucial role in enabling advancement and innovation in the semiconductor industry, encompassing a wide range of processes and technologies essential for the production of microprocessors and other electronic components.
These solutions include semiconductor processing, fabrication, and packaging, which are vital for ensuring efficiency and reliability in semiconductor manufacturing plants. Key techniques such as wafer fabrication, chemical mechanical planarization (CMP) and lithography are employed to achieve ultra-high purity standards in clean room environments.
Semiconductor manufacturers require precision, purity and productivity. As a single-source supplier, partnering with Parker ensures a consistent and reliable supply of high-performing components and systems along with simplified procurement. In turn, productivity can be lifted with reduced downtime, and products can be brought to market faster and more efficiently.
With a wide range of innovative semiconductor solutions to enhance semiconductor production capabilities, Parker is helping semiconductor manufacturers meet the growing demand for advanced electronic devices.
From fluid and gas manufacturing and supply during the off-site production stage, to specialised tools for front and back-end processes during on-site production, Parker has a range of solutions and components to power each stage of the semiconductor manufacturing process.
Off-site production is an integral part of the semiconductor manufacturing process, where essential materials are manufactured and prepared before reaching the main production facility, ensuring that stringent regulations are met for semiconductor production.
This includes bulk filling, cylinder filling and ultra-high purity (UHP) gas handling. Products such as non-conductive thermoplastic hoses and UHP bulk diaphragm valves help to maintain the ultra-high purity of gases to prevent contamination and ensure preparation for transport and delivery.
For bulk delivery, deionized water (DI), UHP gas and chemical fluids must be safely and reliably transported to the semiconductor fabrication plant, maintaining the quality and purity of the fluids and gases.
UHP PFA tube fittings can be used to ensure secure, leak-free connections during the delivery of deionized water and chemical fluids. Whilst UHP stainless steel fittings and pressure regulators ensure the secure delivery of gas, maintaining consistency and quality.
On-site production in the semiconductor industry involves the safe storage and management of deionized water, chemical fluids, and ultra-high purity (UHP) gases to ensure their purity and stability.
For DI water and chemical fluids, UHP PFA tube fittings are utilised to create secure, leak-free connections, ensuring liquids and fluids are transported without contamination. Additionally, UHP stainless steel fittings and pressure regulators are employed for the secure delivery of gases, maintaining their consistency and quality throughout the production process.
To effectively power the semiconductor manufacturing plant, a number of components and systems are required to power the different floors including the facility room, sub-fabrication room, cleanroom and fan deck.
High-efficiency particulate air (HEPA) filters are essential for HVAC systems throughout the facility, sub-fabrication and cleanrooms in semiconductor manufacturing, to ensure a clean environment and air quality throughout the plant.
The correct and specialised machine tools are integral to power each stage of the semiconductor manufacturing process. From lithography machines to pattern silicon wafers in the front-end process, through to semiconductor packaging in the back-end process, Parker's extensive range of semiconductor solutions and components ensures precision and operational efficiency is maintained.
With the semiconductor industry constantly evolving, Parker remains focused on providing innovative solutions for semiconductor equipment manufacturers that enable long-term performance, efficiency and durability.
Along with a broad range of systems and solutions, Parker's semiconductor experts have a depth of engineering expertise to help you design more efficient and reliable machines to maximise yield and uptime.
Get in touch with our semiconductor experts to discuss how we can help you overcome challenges in the semiconductor manufacturing process and improve operational efficiency.