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Bioscience and Water Filtration Division

Bioscience and Water Filtration Division - Chemical distribution
679945:MARKETS

Chemical distribution

Chemical distribution systems are designed to deliver chemicals and chemistries to the production tools used for wet processing of wafers. Often the wet process chemical is pumped through filters into a day tank which feeds the filtered chemicals to the process tools in the fab. Filtration flow rates are typically low and often single-pass, meaning the process chemical is filtered only once. Because filters have one or few opportunities to remove unwanted particles, filters with high particle removal efficiency should be used.

 

Parker Bioscience Filtration offers filters that are ideal for chemical distribution. These filters are designed for single or minimal pass systems and optimized for the highest particle removal efficiency and cleanliness.

 


 

Products for Chemical Distribution

  • Download literature using the product links below

    CHEMICAL DISTRIBUTION

    PFA supported PTFE

    Fluoroflow Cartridge Filter

    0.05 | 0.1 | 0.2 | 0.45 | 1.0 µm

    All-fluoropolymer construction

    Fluoroflow – Select Cartridge Filter

    0.03 | 0.05 | 0.1 | 0.2 | 0.45 | 1.0 µm

    All-fluoropolymer construction with innovative
    SELECT  pleating technology to increase filtration area
    by over 70%.

    Fluoroflow-HSA Cartridge Filter

    0.03 | 0.05 | 0.1 | 0.2 | 0.45 | 1.0 µm

    All-fluoropolymer construction with more effective
    filtration area for increased flow.

    Trufluor + Housing

    Chemically resistant and high –purity PFA (wetted
    parts)  and PVDF (non-wetted parts) construction.

    HDPE Structure

    Chemflow-PE Cartridge Filter

    0.05 | 0.1 | 0.2 | 1.0 µm

    Chemically resistant PTFE/HDPE construction with
    low metal extractables

    Chemflow-PE Select Cartridge Filter

    0.03 | 0.05 | 0.1 | 0.2 | 1.0 µm

    Chemically resistant HDPE/PTFE construction with
    innovative SELECT pleating technology to provide
    outstanding flow.

    Polypropylene (PP) Structure

    Clariflow-E Select Cartridge Filter

    0.02 | 0.04 | 0.1 | 0.2 µm

    Unique hydrophilic PES mirrored anisotropic
    membrane and high-purity, all polypropylene support structure with innovative SELECT pleating technology
    for increased flow.

    Polyflow Membrane Cartridge Filter

    0.04 | 0.07 | 0.1 | 0.2 µm

    All-polypropylene construction and high particle
    retention.

    Polyflow Membrane Select Cartridge Filter

    0.04 | 0.07 | 0.1 | 0.2 µm

    All-polypropylene construction with innovative SELECT
    pleating technology to increase membrane area by
    over 50%

    Proflow II-E Cartridge Filter

    0.03 | 0.05 | 0.1 | 0.2 | 0.45 | 1.0 µm

    Chemically-resistant polypropylene structure with
    hydrophobic PTFE membrane

    Proflow II -E Select Cartridge Filter

    0.03 | 0.05 | 0.1 | 0.2 | 0.45 | 1.0 µm

    Chemically-resistant polypropylene structure and
    hydrophobic PTFE membrane with innovative SELECT
    pleating technology to increase filtration area and flow
    by 50%

    Proflow-HE Cartridge Filter

    0.05 | 0.1 | 0.2 | 0.5 | 1.0 | 3.0 | 10.0 µm

    Chemically-resistant polypropylene structure with
    hydrophilic PTFE membrane. Ideal for most dilute acids
    and bases.

GLOBAL CONTACT
Parker Bioscience Filtration

+1 805 604 3400
+1 877 784 2234

bioscience.na@parker.com

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