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Bioscience and Water Filtration Division

Bioscience and Water Filtration Division - Batch wet etch & clean
679945:MARKETS

Batch wet etch & clean

Batch wet etch and clean processes involve the processing of multiple wafers simultaneously. The wafers are typically immersed and the process chemistry is recirculated repeatedly through filtration designed to remove particles that are being etched from the surface of the wafers. In these multi-pass wet etch and clean processes, filters with higher flow properties can increase bath turnover to improve particle removal efficiency.

 

Parker offers a range of filter cartridges in chemically resistant and low metals materials that can improve this process bath turnover. Our exclusive SELECT pleat filters provide the flow and lifetime typically desired in critical wet etch and clean processes. In addition, our Fluorocap line of filter capsules are highly effective in removing particles from very aggressive and high temperature wet processes.

 




Products for batch wet etch & clean

  • Download literature using the product links below

    BATCH WET

    PFA supported PTFE

    Fluoroflow-HSA Cartridge Filter

    0.03 | 0.05 | 0.1 | 0.2 | 0.45 | 1.0 µm

    All-fluoropolymer with more effective filtration area for increased flow.

    Fluoroflow – Select Cartridge Filter

    0.03 | 0.05 | 0.1 | 0.2 | 0.45 | 1.0 µm

    All-fluoropolymer with innovative SELECT pleating technology to increase filtration area by over 70%

    Fluoroflow-XF Cartridge Filter

    0.03 | 0.05 | 0.1 µm

    All-fluoropolymer with high-flow asymmetric PTFE membrane.

    Fluoroflow-XL Cartridge Filter

    0.02 | 0.03 | 0.05 | 0.1 µm

    All-fluoropolymer 3.25” diameter cartridge with
    innovative SELECT pleating technology for our
    highest effective filtration area & flow rate.

    Fluorocap Capsule Filter

    0.03 | 0.05 | 0.1 | 0.2 | 0.45 | 1.0 µm

    All-fluoropolymer encapsulated filter for aggressive applications to 180°C.

    Fluorocap-Select Capsule Filter

    0.03 | 0.05 | 0.1 | 0.2 | 0.45| 1.0 µm

    All-fluoropolymer encapsulated filter with innovative SELECT pleating technology to increase filtration area and flow by over 25%.

    Fluorocap-XF Capsule Filter

    0.03 | 0.05 | 0.1 µm

    All-fluoropolymer encapsulated filter with high-flow asymmetric PTFE membrane is designed for
    outstanding high temperature recirculated etch
    batch performance.

    Fluorocap-XL Capsule Filter

    0.03 | 0.05 | 0.1 µm

    All-fluoropolymer encapsulated filter combines a large diameter cartridge design and innovative
    SELECT pleating technology to provide our
    highest filtration area and flow.

    HDPE Structure

    Chemflow-PE Select Cartridge Filter

    0.03 | 0.05 | 0.1 | 0.2 | 1.0 µm

    Chemically resistant HDPE/PTFE with innovative SELECT pleating technology to provide
    outstanding flow.

    Chemflow-XF Cartridge Filter

    0.03 | 0.05 | 0.1 µm

    Chemically resistant HDPE /PTFE for recirculated applications under 60°C.

    Polypropylene (PP) Structure

    Clariflow-E Select Cartridge Filter

    0.02 | 0.04 | 0.1 | 0.2 µm

    Unique hydrophilic PES mirrored anisotropic
    membrane and high-purity, all polypropylene
    support structure with innovative SELECT pleating
    technology for increased flow.

    Proflow II-E Cartridge Filter

    0.03 | 0.05 | 0.1 | 0.2 | 0.45 | 1.0 µm

    Chemically-resistant polypropylene structure with hydrophobic PTFE membrane.

    Proflow II-E Select Cartridge Filter

    0.03 | 0.05 | 0.1 | 0.2 | 0.45 | 1.0 µm

    Chemically-resistant polypropylene structure and
    hydrophobic PTFE membrane with innovative
    SELECT pleating technology to increase filtration
    area and flow by 50%.

    Proflow-HE Cartridge Filter

    0.05 | 0.1 | 0.2 | 0.5 | 1.0 | 3.0 | 10.0 µm

    Chemically-resistant polypropylene structure with
    hydrophilic PTFE membrane. Ideal for most dilute
    acids and bases.

GLOBAL CONTACT
Parker Bioscience Filtration

+1 805 604 3400
+1 877 784 2234

bioscience.na@parker.com

Capabilities Brochure

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