Parker's range of face seal fittings guarantee a high level of reliability and leak integrity. The VacuSeal fittings range is specifically designed for the semiconductor industry, for applications where ultra-high purity conditions are required.
Seals and O-rings ensure robustness of pneumatic valves in aggressive environments. Fluorocarbon rubber O-Rings from Parker Praedifa are specifically suited to offer long service life in applications of the semiconductor industry.
Parker offers a wide range of connection solutions for pneumatic applications. Besides the patented LF 3000® push-in fittings, Parker's Clean Fit push-in fittings range offers excellent performance in ultra high purity applications of the semiconductor industry.
Parker offers a comprehensive range of key components to achieve coordinated motion control in servo applications, typically processing semiconductors in the production of integrated circuits. Parker's RS Series DC servo motor is particularly suitable for applications which require a very compact solution.
Parker's range of valves for the semiconductor industry include miniature solenoid valves, such as Parker's compact and light weight X-Valve, but also PFA valves that ensure long cycle life and outstanding resistance to aggressive and/or corrosive chemicals in wafer fabrication.
The broad range of instrumentation regulators from Parker allows to control the flow of liquids and gases with speed and precision, especially in aggressive environments. The range includes ultra-high purity gas regulators for applications where cleanliness is critical.