Innovation

Porter’s Vaporizer Module, in conjunction with the D2000i Liquid Mass Flow Controller, is the heart of a system to provide stable, accurate vapor delivery for a variety of liquid sources.  Our patented technology yields products that serve as critical components in Direct Liquid Injection systems for Semiconductor Precursors and we have partnered with major tool manufacturers on the development of delivery systems for the latest chemistries.

The baffled and channeled grid maintains an efficient inlet to outlet fluid communication by a system of seamless slots.  The cross-sectional area of the seamless slots is small enough to prevent surface tension from beading the liquid, which would reduce contact with the heated surface and reduce efficient heat transfer.  Liquid is turned into vapor by the application of heat a full 360° surrounding the liquid surface.  The horizontal fluid communication channels create a baffle to any uncontrolled vaporization, allowing fluid to slip sideways as vapor bubbles travel rapidly up the multiple count main grid pathways.  The grid geometry efficiently vaporizes a direct liquid inlet flow as well as a mixed, atomized aerosol inlet flow from a mixing valve output containing liquid and a carrier gas.  A carrier gas is often used in vaporizing systems to reduce the temperature required to achieve vaporization, thereby minimizing precursor breakdown and damage.

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